发明名称 ULTRASONIC POLISHING
摘要 <p>Ultrasonic polishing without substantial loss of fine resolution and detail is provided by employing a tool (2) of a more ultrasonically abradable material than the workpiece, (4) as the oscillating driver of a liquid abrasive slurry. The tool is preferentially eroded and conforms to the pattern of the workpiece continuous self-dressing during polishing.</p>
申请公布号 WO1989008535(A1) 申请公布日期 1989.09.21
申请号 US1989000962 申请日期 1989.03.10
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