| 摘要 |
PURPOSE:To stabilize a medicinal liquid property by holding a medicinal liquid tank in a medicinal liquid circulation tank and holding this medicinal liquid circulation tank in a gas-filled tank and covering the surfaces of medicinal liquid contained in both the medicinal liquid tank and the medicinal liquid circulation tank with the introduced inert gas. CONSTITUTION:Medicinal liquid 10 is stored in a medicinal liquid tank 1 in which a specimen is treated. Further this medicinal tank 1 is held in a medicinal liquid circulation tank 2 equipped with a circulation function and the medicinal liquid overflowed from the medicinal liquid tank 1 is clarified therein and returned to the medicinal tank 1. Furthermore the circulation tank 2 is held in a gas-filled tank 3 and also the surfaces of medicinal liquid contained in the tank 1 and the circulation tank 2 are covered with introduced inert gas. As a result, the stabilization of the performance of medicinal liquid can be realized and the title equipment largely contributes to the stable formation of a submicron pattern. |
