Method for eliminating dust particles from surfaces in a gaseous environment

摘要

The method according to the invention eliminates dust particles from surfaces of solid bodies. The method is efficient for particle sizes down to a few nanometers. The solid body (3) to be freed of dust particles is subjected to a beam (8) of electromagnetic radiation flashes. If, at the same time, an electric voltage generated by the voltage generator (6) is applied between the solid body (3) to be freed of particles and a collector electrode (collecting electrode) (5), this results in the particles being detached and eliminated from the solid body (3). The process can be made more efficient by employing a blower (7). Evaporation of the particles does not necessarily occur. The method can be applied, in particular, to the elimination of very small particles from those surfaces, whose being covered by particles during the fabrication of integrated circuits puts at risk the functionality of these circuits. <IMAGE>