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发明名称
ION SOURCE
摘要
申请公布号
JPH01236546(A)
申请公布日期
1989.09.21
申请号
JP19880289800
申请日期
1988.11.16
申请人
OSAKA PREFECTURE;KURAIOBATSUKU:KK
发明人
OGAWA SOICHI;OKAMOTO AKIO;UENO TSUTOMU;FUKUI SHIGEO
分类号
H01J27/02;H01J37/08;H01J37/305;H01L21/30
主分类号
H01J27/02
代理机构
代理人
主权项
地址
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