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经营范围
发明名称
CHARGE BEAM WRITING PROCESS
摘要
申请公布号
JPH01236624(A)
申请公布日期
1989.09.21
申请号
JP19880064027
申请日期
1988.03.17
申请人
MATSUSHITA ELECTRON CORP
发明人
YAMAO TATSUHIKO
分类号
H01L21/027;H01L21/30
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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