Turbo-molecular pump.

摘要

The present invention provides a turbo-molecular (1) pump in which an exhaust action is achieved by virtue of the combination of stationary blades (4) rotor blades adapted to rotate at high speed and to cooperate with each other to impart momentum to gaseous molecules rushing in against the blades under an extremely low-pressurized condition. Disposed inside the casing are a fixed shaft (2) and the rotor (3), the latter being movably supported by a pair of active radial magnetic bearings. A motor (6) is interposed between said pair of magnetic bearings. A dynamic damper (10) is provided at one end of the fixed shaft to inhibit the occurrence of vibrations.