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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01235370(A)
申请公布日期
1989.09.20
申请号
JP19880060375
申请日期
1988.03.16
申请人
HITACHI LTD
发明人
IGURA YASUO;MATSUOKA HIDEYUKI;YOSHIMURA TOSHIYUKI;TAKEDA EIJI
分类号
H01L29/88;H01L21/8234;H01L21/8238;H01L27/08;H01L27/088;H01L27/092;H01L29/20;H01L29/66;H01L29/78
主分类号
H01L29/88
代理机构
代理人
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地址
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