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发明名称
Apparatus for use in producing a multiple image mask to be employed in photolithographic processing
摘要
申请公布号
GB2215477(A)
申请公布日期
1989.09.20
申请号
GB19880004793
申请日期
1988.03.01
申请人
* FERRANTI PLC
发明人
IAN DOUGLAS * GOOCH
分类号
G03F7/20
主分类号
G03F7/20
代理机构
代理人
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