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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01235253(A)
申请公布日期
1989.09.20
申请号
JP19880061168
申请日期
1988.03.15
申请人
SEIKO EPSON CORP
发明人
IWAMATSU SEIICHI
分类号
H01L23/52;H01L21/20;H01L21/3205
主分类号
H01L23/52
代理机构
代理人
主权项
地址
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