| 摘要 |
PURPOSE:To make a heating element have a plane on the top and make its wiring part fine, by a method wherein the wiring part showing a superconduction effect is formed by heating selectively a surface of a ceramic substrate composed of a superconductive substance, and the wiring part is buried in the substrate. CONSTITUTION:A ceramic substrate showing a superconduction effect by heating at not less than a specific temperature is used for the ceramic substrate 1 which is a substrate of a thermal head. Then, only a wiring 2 is made to have the superconduction effect by irradiation of laser only on a pattern position corresponding to the outgoing wiring 2 from a heating element 3 on the ceramic substrate 1 to be burnt. Then, the heating element 3 is formed at a specific position by evaporation deposit, and about 2 to 3mum of a protective film 4 for protecting the heating element from abrasion is so formed as to cover all the heating element 3 thereon. The wiring part 2 is thus buried in the substrate 1 and is electrically connected to a bottom part of the heating element 3. Therefore, an upper surface of the heating element 3 is made flat, and an upper surface of the protective film 4 becomes also higher than the other part and flat. |
