发明名称 |
IMPROVEMENTS IN THE MANUFACTURE OF INTEGRATED CIRCUITS USING HOLOGRAPHIC TECHNIQUES |
摘要 |
Apparatus for the manufacture of integrated circuits using holographic techniques in which a holographic image formed on a first recording medium provided on a glass slab is replayed by being scanned in order to reproduce an image of the holographic image on a second recording medium provided on a silicon slice. The replay source provides a a collimated narrow circular beam or elongated beam which passes normally through a face of the prism, through an index matching liquid located between the prism and the glass slab before being totally internally reflected at the other surface of the glass slab. The collimated replay beam provides control over the effective numerical aperture thus preventing wide angle radiation from degrading the quality of the printed image. |
申请公布号 |
GB2215484(A) |
申请公布日期 |
1989.09.20 |
申请号 |
GB19890002379 |
申请日期 |
1989.02.03 |
申请人 |
* HOLTRONIC TECHNOLOGIES LIMITED |
发明人 |
NICHOLAS JOHN * PHILLIPS |
分类号 |
G03F1/00;G03F7/20;G03H1/22;H01L21/027;H01L21/30 |
主分类号 |
G03F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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