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发明名称
SURFACE ANALYZER
摘要
申请公布号
JPH01235840(A)
申请公布日期
1989.09.20
申请号
JP19880061866
申请日期
1988.03.17
申请人
TOSHIBA CORP
发明人
KURITA MASATO
分类号
G01N23/223;H01J37/18;H01L21/205
主分类号
G01N23/223
代理机构
代理人
主权项
地址
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