发明名称 RECOGNITION DEVICE FOR SEMICONDUCTOR MANUFACTURING DEVICE
摘要 PURPOSE:To automatically adjust the light quantity of an illumination lamp by a device itself by outputting a signal by a control means, and increasing the light quantity of the lamp set in advance based on the signal when it is judged that an image is unrecognizable by an image processing means. CONSTITUTION:An IC frame (an object to be processed) is irradiated by the illumination lamp 11 to image-pick up the IC frame by a television camera 7. At this time, when a processing is impossible due to the inappropriate brightness of an image pickup plane and deviation from the range of a binarization processing at an image processing device 13, information representing the fact is outputted from the image processing device 13 to a controller 14. The controller 14 outputs a signal to a D/A converter by a command programmed in advance, and furthermore, the signal is sent to a driver 16. The driver 16 permits a current designated by the controller 14 to flow on the illumination lamp 11, and the light quantity of the lamp is changed as designated by the control of the controller 14, thereby, the light quantity can be adjusted automatically.
申请公布号 JPH01233572(A) 申请公布日期 1989.09.19
申请号 JP19880061421 申请日期 1988.03.14
申请人 MITSUBISHI ELECTRIC CORP 发明人 YOSHIDA HARUO
分类号 H01L21/60;G06T1/00 主分类号 H01L21/60
代理机构 代理人
主权项
地址