PRODUCTION OF SILICON CARBIDE-METALLIC SILICON MATERIAL

摘要

PURPOSE:To uniformly impregnate metallic Si into an SiC green body and to make the green body impermeable to gas by impregnating metallic Si into the green body obtd. by molding specified SiC powder in an inert gaseous atmo sphere or in vacuum. CONSTITUTION:SiC powder of 1-600mum particle size is immersed in hydrofluoric acid and washed to obtain SiC powder having <=1.0wt.% oxygen content. A binder, a plasticizer such as polyethylene glycol and water are added to the obtd. SiC powder and they are kneaded and molded to obtain a green body. Metallic Si is impregnated into the green body under heating at 1,414-1,800 deg.C in an atmosphere of an inert gas such as Ar or N2 or in vacuum.