| 摘要 |
<p>PURPOSE:To stably obtain a liquid crystal color display device having color filters (CF) on the inside surface of a substrate at a good yield by removing the residual photolithographic film after production of the CFs with a photolithographic stage. CONSTITUTION:Either one or both of an insulating org. film and insulating inorg. film are formed as protective films on the three-color CFs 3 after formation of the CFs 3 and thereafter, the substrate is immersed into a soln. mixture composed of sulfuric acid and hydrogen peroxide soln., aq. hydrochlorite soln., aq. sodium metasiliate soln., etc. The residual photolithographic film 2 is removed by executing O2 plasma ashing, chemical cleaning which involves ozone cleaning or the like, or physical cleaning such as ion bombardment. Stable patterning is executed by removing the residual photolithographic film 2 even if the transparent conductive film exists on the CFs 3. The defective adhesion of the seal is thus prevented. The liquid crystal color display device is thereby obtd. stably at the good yield.</p> |
