| 摘要 |
PURPOSE:To stabilize the operation of an apparatus, by applying respective specified voltages to respective bimorph type piezoelectric elements of a plurality of stages of stage displacement mechanism and by transmitting the displacement operation successively to the stage side via the displacement transmission arm of each stage. CONSTITUTION:A positioning device body 11 is equipped with a stage 12 for placing a driven body thereon and a displacement expansion mechanism 13. Said stage 12 is formed by a moving part of almost rectangular shape arranged nearly in the center of said body 11 and the first - second stage displacement mechanisms 14-15 of said displacement expansion mechanism 13 are lamination- arranged on both sides. Also, the first stage displacement mechanism 14 is provided with a pair of bimorph type piezoelectric elements 16a-16b, a supporting frame 17, and a displacement transmission arm 18. Further, said supporting frame 17 is provided with cell-fitting openings 19a-19b and said displacement transmission arm 18 is provided with protrusions 20a-20b. On the other hand, the second stage displacement mechanism 15 is constituted in a like manner. Thus, the displacement operation is transmitted to the stage side via each arm, while being laminated successively. |
