| 发明名称 |
LIGHT SENSITIVE DIAZO COMPOUNDS, COMPOSITION AND METHOD OF MAKING THEM |
| 摘要 |
<p>The specification discloses photosensitizers comprising esters of 1-oxo-2-diazo-naphthalene sulfonic acid and 4-benzl-1,2,3-trihydroxoybenzene, photo resists based thereon and methods for making the necessary intermediates and final products. The esters show improved sensitivity to light in the mid UV range.</p> |
| 申请公布号 |
CA1259623(A) |
申请公布日期 |
1989.09.19 |
| 申请号 |
CA19870532799 |
申请日期 |
1987.03.24 |
| 申请人 |
EAST SHORE CHEMICAL CO. |
发明人 |
COHEN, LOUIS C.;GUTSELL, ERWIN S., JR. |
| 分类号 |
G03F7/022;(IPC1-7):C07C143/68;G03C1/56 |
主分类号 |
G03F7/022 |
| 代理机构 |
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| 主权项 |
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