发明名称 |
KAPAZITIVER SCHALLWANDLER |
摘要 |
Capacitive sound transducer of a very small construction, in particular a microphone has at least two joint semiconductor chips, which embody a membrane unit and a fixed counter-electrode structure. The acoustic active portion of the membrane unit 1 with at least one counter-electrode structure 3, which is separated from the membrane unit by means of an air gap, forms a system which is comparable to a field effect transistor. The membrane unit which is formed of a semiconducting ground material encompasses an acoustically active membrane surface (2), one side 5 of which confronts the counter-electrode structure is electrically conductive. The counter-electrode structure 3 has a semiconductive base material out of which there is machined a channel length which has been limited by a source-drain arrangement, the geometric width measurrement of which is on the order of magnitude of a tenth of the lateral measurement of the active membrane surface. |
申请公布号 |
DE3807251(A1) |
申请公布日期 |
1989.09.14 |
申请号 |
DE19883807251 |
申请日期 |
1988.03.05 |
申请人 |
SENNHEISER ELECTRONIC KG, 3002 WEDEMARK, DE |
发明人 |
KUEHNEL, WOLFGANG, DIPL.-ING., 6100 DARMSTADT, DE |
分类号 |
H04R19/00 |
主分类号 |
H04R19/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|