发明名称 MATERIAL FOR PHOTODECOLORIZABLE LAYER AND METHOD FOR FORMING PATTERN BY USING SAME
摘要 PURPOSE:To improve storage stability of a coating solution and to facilitate operation by forming the photodecolorizable layer comprising a styryl type dye having a triazine structure soluble in an organic solvent low in polarity as a photodecolorizable dye and a rosin as a binder. CONSTITUTION:The photodecolorizable layer is formed by using as the binder resin one of the rosins, and as the photodecolorizable dye the styryl type dye having a triazine structure soluble in an organic solvent low in polarity represented by formula I in which each of R1-R5 is hydrogen, halogen, hydroxy, carboxylic ester, or the like. The patterns is formed by coating a substrate 21, such as a film-coated silicon base plate, with a resist 22, spin coating the resist 22 directly with the photodecolorizable layer 23, exposing the layer 23 through a photomask 24 to ultraviolet rays, and finally developing the layer 23 and the layer 22 at the same time by using an alkaline solution, thus permitting the obtained photodecolorizable layer to be suitable in optical characteristics and easy in coating operation, and the material for the photodecolorizable layer capable of executing direct development and the method for forming the pattern to be ensured.
申请公布号 JPH01231040(A) 申请公布日期 1989.09.14
申请号 JP19880056272 申请日期 1988.03.11
申请人 OKI ELECTRIC IND CO LTD;FUJI YAKUHIN KOGYO KK 发明人 TO YOICHI;YAMASHITA YOSHIO;KAWAZU TAKAHARU;JINBO HIDEYUKI;ASANO TAKATERU;KOBAYASHI KENJI
分类号 G03F7/26;G03C1/73;G03F7/095;G03F7/105;H01L21/027 主分类号 G03F7/26
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