摘要 |
PURPOSE:To reduce the washing frequency of a permeable membrane, by forming a polisher apparatus from a mixed bed consisting of an anion exchange resin bed, a strong basic anion exchange resin bed and a strong acidic cation exchange bed. CONSTITUTION:Pure water with high purity sterilized by ultraviolet rays is introduced into a polisher apparatus 3 which comprises a mixed bed consisting of a perfectly regenerated anion exchange resin bed, an almost perfectly regenerated strong basic anion exchange resin bed and an almost perfectly regenerated strong acidic cation exchange bed. The pure water with high purity flowed out from the polisher apparatus 3 is further supplied to a membrane separation apparatus 4 having a permeable membrane based on polyacrylonitrile or polyaminde to remove a fine nonionic substance and the flowed-out pure water with ultra-high purity, purified to a high degree is supplied to a use point and utilized. |