发明名称 Device for exposing a sample which has been provided with a radiation-sensitive layer
摘要 The Synchrotron radiation (RS) generated in a circular accelerator is usually guided through an evacuated beam tube (SR) to the exposure station. The beam tube window (F) for the exit of the Synchrotron radiation (RS) essentially consists of a thin foil (KF) of Kapton or beryllium and a supporting grid (SG) carrying the film. To prevent the metal supporting grid (SG) from being imaged, it is proposed to rotate the beam tube window (F) during the exposure process in the Synchrotron beam (RS). <IMAGE>
申请公布号 DE3806950(A1) 申请公布日期 1989.09.14
申请号 DE19883806950 申请日期 1988.03.03
申请人 SIEMENS AG, 1000 BERLIN UND 8000 MUENCHEN, DE 发明人 BREHM, KLAUS, DIPL.-ING., 1000 BERLIN, DE
分类号 G03F7/20;H01J35/00;H01J35/18 主分类号 G03F7/20
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