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发明名称
VAPOR CLEANING APPARATUS
摘要
申请公布号
JPH01231329(A)
申请公布日期
1989.09.14
申请号
JP19880056239
申请日期
1988.03.11
申请人
SHIN ETSU HANDOTAI CO LTD
发明人
KUDO HIDEO
分类号
H01L21/304;B08B3/08
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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