MATERIAL FOR PHOTODECOLORABLE LAYER AND PATTERN FORMING METHOD BY USING SAID MATERIAL

摘要

PURPOSE:To improve the preservable stability of a coating soln. and to improve workability by forming a photodecolorable layer of a material contg. 2,5- dialkoxy-4-P alkoxyphenyl mercapto-benzene diazonium hexafluorophosphate soluble in a low polar org. solvent as a photodecolorable dye and rosins as a binder. CONSTITUTION:The photodecolorable layer is formed by using the 2,5- dialkoxy-4-P alkoxyphenyl mercapto-benzene diazonium hexafluorophosphate soluble in the low polar org. solvent as the photodecolorable dye and the rosins as the binder resin. A resist 22 is coated on an underlying layer 21 consisting of a silicon substrate with a film and the photodecolorable layer 23 is directly spin-coated thereon. The resist is then exposed by UV rays through a photomask 24. The photodecolorable layer 23 and the resist layer 22 are simultaneously developed by using an aq. alkaline soln. by which the patterns are formed thereon. The photodecolorable layer material which has the adequate optical characteristics and excellent workability at the time of coating and allow direct development and the pattern forming method by using said material are thereby obtd.