发明名称 Coupling for cooled electrode in cathodic - sputtering vessel
摘要 <p>A flat circular ring coupling is bolted to wall of vessel and a pair of concentric tubes pass through it, the outer one beig integral with a hollow electrode. Coolant flows to electrode through tubes, and a socket is attached to the coupling, having a chamber in which outer tube terminates and to which liquid outlet is connected. Seals are fitted in chamfered circular grooved between socket and coupling, between coupling and vessel, and outer tube is held in coupling by a grub screw pressing on it, threated into radial bore in coupling. Used, e.g. for electrode of cathodic suttering vessel.</p>
申请公布号 FR2052130(A5) 申请公布日期 1971.04.09
申请号 FR19690024717 申请日期 1969.07.21
申请人 RADIOTECHNIQUE LA COMPEL 发明人
分类号 F16J15/10;H01J37/34;(IPC1-7):16J15/00;23C15/00 主分类号 F16J15/10
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