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发明名称
FLATTENING METHOD
摘要
申请公布号
JPH01230254(A)
申请公布日期
1989.09.13
申请号
JP19880056937
申请日期
1988.03.10
申请人
SANYO ELECTRIC CO LTD
发明人
SHUDO SHOJI;MAMENO KAZUNOBU
分类号
H01L21/3205;H01L21/302;H01L21/3065
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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