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发明名称
MOLECULAR RAYS EPITAXIAL GROWTH
摘要
申请公布号
JPH01230499(A)
申请公布日期
1989.09.13
申请号
JP19880056912
申请日期
1988.03.10
申请人
FUJITSU LTD
发明人
NAKADA YOSHIAKI;FUJII TOSHIO
分类号
H01L21/203;C30B23/08;C30B29/40
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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