| 摘要 |
A transducer, e.g. for the sensing and measurement of acceleration, includes an oscillatory structure comprising three parallel filaments (15, 16, 17) coupled to a seismic mass (13). The frequency of oscillation of the filaments corresponds to the magnitude of displacement of the mass in response to an accelerating force. The filaments are maintained in oscillation in a mode such that the centre filaments (16) oscillates in antiphase with the two outer filaments (15, 17) to provide a balanced arrangement. Piezoresistive devices are implanted at the ends of the filaments for both driving and frequency sensing. The mass (13) is also connected to the support frame (11) by hinges (14) and the structure is made by etching a single piece of silicon. <IMAGE> |
