| 摘要 |
PURPOSE:To contrive prevention of damaging of manufacturing device and reduction of impurities in semiprocessed material, by flame hydrolyzing glass raw material containing alkoxide and depositing formed glass fine particles. CONSTITUTION:Glass raw material containing alkoxide expressed by the formula Si(OR)4, etc., (with a proviso that R is hydrocarbon group) is prepared. The raw material is flame hydrolyzed by combustion gas such as hydrocarbon gas, combustion improving gas such as O2 or inert gas and glass fine particles are generated. Next, the glass fine particles are deposited on a rotating starting material, resultant porous material is dehydrated and sintered at a high temperature to obtain processed material of transparent glass. In a flame hydrolysis of alkoxide, generated R-OH is completely burned and remained carbon is removed as oxide. As a result of above process, no further generation of hydrogen halide is occurred, thus damaging of device is prevented and impurities in semiprocessed material is reduced. |
