Method and apparatus for measuring an interval between two objects.

摘要

A device for measuring an interval between two plate-like objects (2, 3) includes a light source (LD) for projecting a light toward the objects, a detector (8) for detecting a position of incidence, upon a predetermined surface, of the light projected by the light source and deflected by the two objects, and a calculating portion for measuring the interval of the two objects on the basis of the detection by the detector.