发明名称 Optical surface waviness measuring apparatus
摘要 A surface waviness measuring apparatus for specularly reflecting surfaces has a light source (22) and an optical system (23) which directs a light beam (24) obliquely onto the surface (14), with the light beam (24) forming a small primary light bead (12) there. A spherical concave mirror (11) is arranged at the angle of reflection ( alpha ) with the center of curvature (13) of the spherical concave mirror being arranged closely adjacent the small primary light bead (12) on the reflecting surface (14). A photoreceiver arrangement (16) is located at the angle of reflection of the light beam (15) reflected from the concave mirror (11).
申请公布号 US4866287(A) 申请公布日期 1989.09.12
申请号 US19880264101 申请日期 1988.10.28
申请人 ERWIN SICK GMBH OPTIK-ELEKTRONIK 发明人 WEBER, KLAUS
分类号 G01B11/30 主分类号 G01B11/30
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