发明名称 Optical imaging arrangement comprising an opto-electronic focussing-error detection system
摘要 An optical imaging arrangement is described which comprises an opto-electronic focussing-error detection system (1, 2, 3, 4, 5, 6, 12, 13, 14, 18, 19, 20, 21) for determining a deviation between the image plane (PL) of the imaging system (L) and a second plane (PS) in which the image is to be formed. The image plane (PF) of the focussing-error detection system is adjustable, for example by means of a pivotable plane-parallel plate (15), so that the zero point of the focussing-error signal (Sf) is adjustable.
申请公布号 US4866262(A) 申请公布日期 1989.09.12
申请号 US19880157103 申请日期 1988.02.09
申请人 U.S. PHILIPS CORPORATION 发明人 VAN DER WERF, JAN E.;BIESTERBOS, JOHANNES W. M.
分类号 G02B7/28;G02B7/32;G03B27/34;G03F7/207;G03F9/00;H01L21/027 主分类号 G02B7/28
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