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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01228169(A)
申请公布日期
1989.09.12
申请号
JP19880055251
申请日期
1988.03.08
申请人
MITSUBISHI ELECTRIC CORP
发明人
TSUTSUMI TOSHIAKI;OKUMURA YOSHIKI
分类号
H01L29/43;H01L21/205;H01L21/28;H01L21/768
主分类号
H01L29/43
代理机构
代理人
主权项
地址
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