| 摘要 |
<p>PURPOSE:To enable free connections among a plurality of vacuum devices by joining together units of linear, L-shaped, T-shaped, cross-shaped and double- level carrier tunnels, which are equipped with carrier rails inside and vacuum flanges at both ends, respectively. CONSTITUTION:A vacuum carrier tunnel 18 for carrying a sample 27 between vacuum equipments 15-17 successively consisting of units, which are equipped with carrier rails 26 inside and vacuum flanges 25a at both ends, i.e., a linear carrier tunnel 21, an L-shaped carrier tunnel 23, a T-shaped carrier tunnel 22, a cross-shaped carrier tunnel 20 and a double-level carrier tunnel 24 respectively. A plurality of the aforementioned units are joined together so as to match with locations of necessary vacuum devices. It is possible, as a result, to connect freely among a plurality of vacuum devices while keeping maintenance spaces around them and to deal easily with a new or extension setting-up of vacuum equipment.</p> |
