摘要 |
<p>PURPOSE:To obtain the color filter having excellent heat resistance and chemical resistance by selectively anodizing a thin metallic film of Al, etc., which has light shieldability thereby forming plural pieces of porous film parts disposed to, for example, a checker pattern. CONSTITUTION:The thin Al films 2 remain in a grid shape without being oxidized by the selective anodic oxidation on an insulating substrate 1 consisting of glass, etc., and constitute a black matrix when the color filter is completed after dyeing. The porous film 3 formed by anodic oxidation of the thin Al film is colored in the later stage. The dye 4 injected from an injection nozzle 5 sticks 4' onto the porous film 3 but the thin Al films 2' of the partitions exist between the respective checkers and, therefore, the coating position of the dye is well controlled. The dye 4' spreads 4'' on the checkers of the porous film 3 and penetrates into the porous film, thereby dyeing the film. The substrate is then immersed in an Ni acetate path and is thereby subjected to a sealing treatment, by which the dyeing is fixed and the color filter is obtd. The light shieldable thin Al films are delineated to enclose the respective porous films 3 of the checker pattern in the same patterning stage and, therefore, a positional deviation between both is not generated and the positional controllability is extremely good.</p> |