| 摘要 |
PURPOSE:To enable a poisonous developer and cleaning water to be drained separately by a method wherein the drainage pipe of the developer and the other drainage pipe of cleaning solution are respectively connected to a transfer valve provided on the drainage pipe. CONSTITUTION:A drainage pipe 10 composed to collect any drainage is connected to a transfer valve e.g., a solenoid valve 14. Besides, this solenoid valve 14 is connected to a developer drainage pipe 15 exclusively draining the developer after processing and a cleaning solution drainage pipe 16 exclusively draining the cleaning solution which cleaned up a semiconductor wafer 2 after the developer finishing the development is drained. On the other hand, the other end of the developer drainage pipe 15 is connected to a drainage collector 17 while the other end of the cleaning solution pipe 16 is connected to a drainage processor 18. Through these procedures, the poisonous and highly dangerous processed developer can be collected easily enabling the processed cleaning solution containing a little processed developer to be drainage-processed easily so that a compact development device may be manufactured without decreasing the throughput thereof. |
