MOLECULAR BEAM SOURCE CELL,申请号JP19880054349-传众专利搜索

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发明名称	MOLECULAR BEAM SOURCE CELL
摘要
申请公布号	JPH01226794(A)	申请公布日期	1989.09.11
申请号	JP19880054349	申请日期	1988.03.08
申请人	FUJITSU LTD	发明人	ITO KAZUHIKO
分类号	H01L21/203;C30B23/08	主分类号	H01L21/203
代理机构		代理人
主权项
地址

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