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发明名称
PROCESS AND DEVICE FOR PULLING CRYSTAL BY CZ PROCESS
摘要
申请公布号
JPH01226789(A)
申请公布日期
1989.09.11
申请号
JP19880052795
申请日期
1988.03.07
申请人
KYUSHU ELECTRON METAL CO LTD;OSAKA TITANIUM CO LTD
发明人
KAWADA YASUSHI
分类号
H01L21/208;C30B15/16
主分类号
H01L21/208
代理机构
代理人
主权项
地址
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