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发明名称
CHEMICAL VAPOR GROWTH APPARATUS
摘要
申请公布号
JPH01225325(A)
申请公布日期
1989.09.08
申请号
JP19880052042
申请日期
1988.03.04
申请人
MITSUBISHI ELECTRIC CORP
发明人
KISHIBE KENJI
分类号
H01L21/205;H01L21/31
主分类号
H01L21/205
代理机构
代理人
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地址
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