| 摘要 |
PURPOSE:To decrease drastically a material cost and a manufacturing manpower, by performing the pattern treatment of rear electrodes in such a manner that a laser scribing technique which is performed simultaneously with a treatment of an amorphous semiconductor layer is applied and, further, etching is performed so that the printed pattern of a conductive resin which operates as a corrosion-resisting protective film as well as can be used as a mask. CONSTITUTION:A transparent electrode layer 2 is formed on a glass substrate 1. Its layer is divided into transparent electrodes 21, 22, 23, 24... by performing a pattern treatment with a laser scribing technique. Laser beams are irradiated from rear electrode layer sides with a YAG laser and then, cavities 7 are formed to device an amorphous layer into layers 31, 32, 33, 34... and, further, to divide a rear electrode into electrodes 41, 42, 43 44. The patterns 61, 62, 63, 64... of conductive resin films are printed. Using these patterns 61, 62, 63, 64... as masks, cavities 8 are formed so that the rear electrodes 41, 42, 43, 44... are prevented from being connected one another through conductive resins by etching. |
