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发明名称
DISCRIMINATOR OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH01226164(A)
申请公布日期
1989.09.08
申请号
JP19880052797
申请日期
1988.03.07
申请人
KYUSHU ELECTRON METAL CO LTD;OSAKA TITANIUM CO LTD
发明人
MATSUE HIDENAGA
分类号
G01R31/00;H01L21/66
主分类号
G01R31/00
代理机构
代理人
主权项
地址
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