发明名称 BACK-SCATTER ELECTRONS DETECTOR
摘要 A detector for back-scattered electrons includes a scintillator crystal and a light-conducting device for directing away the secondary radiation to a receiver. The light-conducting device is placed against the scintillator crystal in such a way that the secondary radiation is directed away symmetrically to two lines of symmetry. The two lines of symmetry are located in the plane of the scintillator crystal and are at right angles to one another. In this way, a uniform illumination of the scanned image is obtained.
申请公布号 DE3664841(D1) 申请公布日期 1989.09.07
申请号 DE19863664841 申请日期 1986.01.09
申请人 FIRMA CARL ZEISS;CARL-ZEISS-STIFTUNG TRADING AS CARL ZEISS 发明人 KURZ, DIETER, DR.;SCHAFER, NORBERT, DIPL.-ING.
分类号 G01Q30/00;G01Q80/00;G01T1/20;G01T1/202;H01J37/244;(IPC1-7):H01J37/244 主分类号 G01Q30/00
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