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发明名称
LIQUID PHASE EPITAXIAL GROWING PROCESS AND APPARATUS THEREFOR
摘要
申请公布号
JPH01224294(A)
申请公布日期
1989.09.07
申请号
JP19880050924
申请日期
1988.03.03
申请人
FUJITSU LTD
发明人
ITO MICHIHARU;YAMAMOTO KOSAKU;HIROTA KOJI
分类号
H01L21/368;C30B19/00
主分类号
H01L21/368
代理机构
代理人
主权项
地址
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