| 摘要 |
PURPOSE:To restrict the sudden stoppage of an X-Y table due to alarm to be the least necessary one by judging an alarm condition not only by the single condition of the X-Y table but by combining a plurality of conditions. CONSTITUTION:An X-Y table 11 is sent by means of motors 15, 16 driven by X, Y feed signals via the X-axis and Y-axis drivers 18, 19 of a drive unit 12. A sensor 13-1 detects the speed of the motor 15 and outputs HSX=1 at the time of high speed, LSX=1 at the time of low speed, and HSX=LSX=0 on other occasions. A sensor 13-2 detects the speed of the motor 16 and output a HSY=1 at the time of high speed, LSY=1 at the time of low speed, and HSY=LSY=0 on other occasions. A sensor 13-3 outputs CV=0 with a cover 17 open while outputting CV=1 with the cover 17 closed. The signals are inputted into the AND circuits 21, 22 and OR circuit 23 of an alarm circuit 14 and, when HSX=1 or HSY=1 and LSX=CV=1 or LSY=CV=1, an alarm signal is outputted to carry out sudden stoppage. |
