发明名称 INTERCONNECTION METHOD FOR SEMICONDUCTOR DEVICE
摘要 An interconnecting method for a semiconductor device which includes the steps of depositing a high-temperature superconductive material (15) over an interlevel insulation layer (14), and irradiating an energy beam onto a high-temperature superconductive material layer thus formed by the above step so as to effect anneal treatment.
申请公布号 EP0299163(A3) 申请公布日期 1989.09.06
申请号 EP19880107375 申请日期 1988.05.07
申请人 SHARP KABUSHIKI KAISHA 发明人 NAKAGAWA, YASUHITO
分类号 H01L21/3205;H01L21/768;H01L23/522;H01L23/532;H01L39/24;(IPC1-7):H01L23/52;H01L21/90 主分类号 H01L21/3205
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