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发明名称
PHOTOCHEMICAL REACTOR
摘要
申请公布号
JPH01223734(A)
申请公布日期
1989.09.06
申请号
JP19880048889
申请日期
1988.03.02
申请人
TOSHIBA CORP
发明人
ARIKADO TSUNETOSHI
分类号
H01L21/302;H01L21/205;H01L21/263;H01L21/31
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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