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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01223728(A)
申请公布日期
1989.09.06
申请号
JP19880048840
申请日期
1988.03.02
申请人
MITSUBISHI ELECTRIC CORP
发明人
ISHIDA TOMOHIRO
分类号
H01L21/285;H01L21/3205
主分类号
H01L21/285
代理机构
代理人
主权项
地址
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