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发明名称
METHOD AND APPARATUS FOR VAPOR DEPOSITION
摘要
申请公布号
EP0233610(A3)
申请公布日期
1989.09.06
申请号
EP19870102080
申请日期
1987.02.13
申请人
SONY CORPORATION
发明人
KAWAI, HIROJI;IMANAGA, SYUNJI;HASE, ICHIRO;KANEKO, KUNIO;WATANABE, NAOZO
分类号
C23C16/52;(IPC1-7):C23C16/52;G01B11/06
主分类号
C23C16/52
代理机构
代理人
主权项
地址
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