GAS SENSOR UTILIZING SECTION OF MULTILAYER THIN FILM

摘要

PURPOSE:To enable highly sensitive detection of various gases, by a method wherein a low voltage is applied to two layers of metal electrodes close to each other to decompose a gas molecule such as water vapor adsorbed on the surface of the electrodes directly in a electrochemical fashion while a current flowing is monitored. CONSTITUTION:Two layers of metal electrodes 7 and 8 which can be manufactured by exposing a section part 6 of a multilayer thin film with a structure of laminating metal thin films 2 and 4 and insulator thin films 3 and 5 alternately are provided on a ceramic substrate 1 close to each other at a distance of several hundreds - several thousands A. A required voltage source is connected between the electrodes 7 and 8 to decompose a gas molecule adsorbed on the surfaces of the electrodes 7 and 8 directly in an electrochemical fashion under the introduction of a gas such as water vapor or ammonia. Thus, a current flowing between the two layers of the electrodes 7 and 8 is monitored thereby enabling highly sensitive detection the gas introduced.