| 发明名称 |
ELECTRIC CIRCUIT HAVING SUPERCONDUCTING MULTILAYERED STRUCTURE AND MANUFACTURING METHOD FOR SAME |
| 摘要 |
An electric circuit is provided on a semiconductor substrate with a superconducting film. The surfaces in contact with the superconducting film are made of heat-resistant non-oxide insulating materials so that the performance of the superconducting film is not degraded. |
| 申请公布号 |
EP0285445(A3) |
申请公布日期 |
1989.09.06 |
| 申请号 |
EP19880302957 |
申请日期 |
1988.03.31 |
| 申请人 |
SEL SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
YAMAZAKI, SHUNPEI |
| 分类号 |
H01L21/768;H01L23/498;H01L23/532;H01L29/43;H01L39/24;(IPC1-7):H01L23/52;H01L39/12;H01L21/90 |
主分类号 |
H01L21/768 |
| 代理机构 |
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