| 摘要 |
PURPOSE:To safely remove an unreacted component and a reaction product, by passing exhaust gas containing the unreacted component and the reaction product exhausted from a gas phase growing apparatus through plural fine pipes. CONSTITUTION:Because an unreacted component and a reaction product are contained in a gas exhausted from a gas phase growing apparatus using SiH4, AsH2, AsCl3 and PH3 as stock materials, said exhaust gas is introduced into the buffer tank 42-a of an exhaust gas treating apparatus 42 to lower the pressure thereof at first. In the next step, the pressure lowered gas is passed through a cartridge type treating part 42-b having plural fine pipes made of stainless steel to remove the unreacted component and the reaction product contained therein by adhering the same in the stainless steel fine pipes while the treated gas is exhausted through a buffer tank 42-c. By forming the treating part 42-b into a cartridge type, it can be easily replaced and, therefore, the unreacted component can be removed always in good efficiency. |
